3D simulation of a radio-frequency driven mircoplasma jet

Torben Hemke, Thomas Mussenbrock, Ralf Peter Brinkmann

62nd Ga­se­ous Elec­tro­nics Con­fe­rence 2009, Saratoga Springs, NY, USA, 20-23 Oc­to­ber


An increasing number of microplasma sources were developed in the last few years. These sources differ in geometries, single or array discharge configurations, DC or RF discharges, and the used chemistry - depending on the underlying application. In this paper we concentrate on a radio-frequency driven microplasma jet (refered to as the ?-APPJ) invented by Schulz-von der Gathen and co-workers. The ?-APPJ with an electrode gap of 1 mm is driven at 13.56 MHz (approx. 10 W), typical chemistry consists of He with addition of less than 1% molecular oxygen. To study the ?-APPJ in 3D we use a commercial computational fluid dynamics code (CFD-ACE+). We treat the electrons kinetically to build a look-up table for its transport coefficients and include a HeO2 reaction chemistry scheme. We discuss basic insights into the fundamental mechanisms of the ?-APPJ. Finally we present a brief discussion of the results of the 3D simulation compared with a simplified analytical model.

Tags: 3D, APPJ, atmospheric pressure, rf-discharge