Publications

Kinetische Simulation der Dynamik gesputterten Aluminiums in kapazitiv gekoppelten Mehrfrequenzplasmen

2015 - Jan Trieschmann, Stefan Ries, Stefan Bienholz, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2015, Bochum, Ger­ma­ny, 2-5 March

Simulation of Neutral Particle Transport During HiPIMS

2014 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Thomas Mussenbrock

67th Annual Gaseous Electronics Conference, Raleigh (North Carolina), USA, November 3-7, 2014.

Kinetic Approach to Neutral Particle Transport in High Power Impulse Magnetron Sputtering

2014 - Jan Trieschmann, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

The 14th International Conference on Plasma Surface Engineering (PSE) 2014, Garmisch-Partenkirchen, Germany, September 15 - 19, 2014

Simulation of Neutral Particle Transport in High Power Impulse Magnetron Sputtering

2014 - Jan Trieschmann, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

The Fifth International Conference on HIPIMS, Sheffield, UK, July 01 - 03, 2014

Magnetron sputtering and spatio-temporal dynamics of neutral particle transport in a simplified processing reactor

2013 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Thomas Mussenbrock

WELT­PP-16, Kerk­ra­de, The Nether­lands, 21-22 No­vem­ber

Kinetic simulation of neutral particle transport in sputtering processes

2013 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Thomas Mussenbrock, Stefan Ries, Nikita Bibinov, Peter Awakowicz

66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Princeton (New Jersey), USA, 30 September - 04 Oc­to­ber

Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor

2013 - Kirsten Bobzin, Ralf Peter Brinkmann, Thomas Mussenbrock, Nazlim Bagcivan, Ricardo Henrique Brugnara, Marcel Schäfer, Jan Trieschmann

Surface and Coatings Technology 237 (2013) 176-181 [DOI]

Simulation of Neutral Gas Dynamics for PVD DC-MSIP and HPPMS Processes

2013 - Kirsten Bobzin, Nazlim Bagcivan, Sebastian Theiß, Ricardo Henrique Brugnara, Marcel Schäfer, Ralf Peter Brinkmann, Thomas Mussenbrock, Jan Trieschmann

40th International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2013), San Diego (California), USA, 29 April - 03 May
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