Publications

Kinetic Approach to Neutral Particle Transport in High Power Impulse Magnetron Sputtering

2014 - Jan Trieschmann, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

The 14th International Conference on Plasma Surface Engineering (PSE) 2014, Garmisch-Partenkirchen, Germany, September 15 - 19, 2014

Simulation of Neutral Particle Transport in High Power Impulse Magnetron Sputtering

2014 - Jan Trieschmann, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

The Fifth International Conference on HIPIMS, Sheffield, UK, July 01 - 03, 2014

Magnetron sputtering and spatio-temporal dynamics of neutral particle transport in a simplified processing reactor

2013 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Thomas Mussenbrock

WELT­PP-16, Kerk­ra­de, The Nether­lands, 21-22 No­vem­ber

Kinetic simulation of neutral particle transport in sputtering processes

2013 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Thomas Mussenbrock, Stefan Ries, Nikita Bibinov, Peter Awakowicz

66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Princeton (New Jersey), USA, 30 September - 04 Oc­to­ber
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