Publications

The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges

2017 - Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko, Julian Schulze

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges

2017 - Jan Trieschmann, Frederik Schmidt, Thomas Mussenbrock

Plasma Processes and Polymers 14, 1600140 (2017) [DOI]

On the physics of a large CCP discharge

2016 - Denis Eremin, Stefan Bienholz, Daniel Szeremley, Jan Trieschmann, Stefan Ries, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

2016 Plasma Sources Sci. Technol. 25 025020

Transport of Sputtered Particles in Capacitive Sputter Sources

2015 - Jan Trieschmann, Thomas Mussenbrock

Journal of Applied Physics 118, 033302 (2015) [J. Applied Physics] [arxiv.org] [DOI]

The effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges

2015 - Sebastian Wilczek, Jan Trieschmann, Ralf Peter Brinkmann, Thomas Mussenbrock, Julian Schulze, Edmund Schüngel, Aranka Derzsi, Ihor Korolov, Zoltán Donkó

2015 Plasma Sources Sci. Technol. 24 024002

Einschlussgüte von hochenergetischen Beamelektronen in kapazitiven RF-Entladungen

2015 - Sebastian Wilczek, Jan Trieschmann, Ralf Peter Brinkmann, Thomas Mussenbrock, Julian Schulze, Edmund Schüngel, Zoltán Donkó, Ihor Korolov, Aranka Derzsi

DPG Früh­jahrs­ta­gung 2015, Bochum, Ger­ma­ny, 2 March

Plasmaoszillation und lokale Störungen in kapazitiv gekoppelten Niederdruck-Plasmen

2015 - Sebastian Wilczek, Jan Trieschmann, Ralf Peter Brinkmann, Thomas Mussenbrock, Julian Schulze, Edmund Schüngel, Zoltán Donkó, Ihor Korolov, Aranka Derzsi

DPG Früh­jahrs­ta­gung 2015, Bochum, Ger­ma­ny, 4 March

Generation of highly energetic electrons through interaction with modulated plasma sheaths

2014 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Edmund Schüngel, Ralf Peter Brinkmann, Aranka Derzsi, Ihor Korolov, Zoltan Donko, Thomas Mussenbrock

WELT­PP-17, Kerk­ra­de, The Nether­lands, 20-21 No­vem­ber (oral cont­ri­bu­ti­on)

Electron-beam formation and resonances in a symmetric low pressure capacitively coupled plasma

2014 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Edmund Schüngel, Ralf Peter Brinkmann, Zoltan Donkó, Aranka Derzsi, Ihor Korolov, Thomas Mussenbrock

XXII Eu­ropean Con­fe­rence on the Ato­mic and Mole­cu­lar Phy­sics of Io­ni­zed Gases (ES­CAM­PIG), Greifswald, Germany, (2014) [Poster]

Kinetic Simulation of Mode Transitions and Hysteresis Effects in Low Pressure Capacitive Discharges

2014 - Sebastian Wilczek, Jan Trieschmann, Ralf Peter Brinkmann, Thomas Mussenbrock, Aran­ka Derz­si, Ihor Korolov, Zoltan Donko, Edmund Schüngel, Julian Schulze

The 41st IEEE International Conference on Plasma Science (ICOPS) and the 20th International Conference on High-Power Particle Beams (Beams) 2014, Washington DC, USA, May 25 - 29, 2014

Kinetische Simulation von Modenübergängen und Hysterese-Effekten in kapazitiven Hochfrequenzentladungen

2014 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Edmund Schüngel, Ralf Peter Brinkmann, Zoltan Donko, Aranka Derzsi, Ihor Korolov, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2014, Berlin, Ger­ma­ny, 17 - 21 March

Untersuchung des Einflusses von Verschiebungs- und Leitungsstromdichte auf Resonanzeffekte in Hochfrequenzplasmen

2014 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Edmund Schüngel, Ralf Peter Brinkmann, Zoltan Donko, Aranka Derzsi, Ihor Korolov, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2014, Berlin, Ger­ma­ny, 17 - 21 March

Kinetic simulation of low pressure capacitively coupled plasmas: Analysis of an abrupt mode transition

2013 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Thomas Mussenbrock

WELT­PP-16, Kerk­ra­de, The Nether­lands, 21-22 No­vem­ber (oral cont­ri­bu­ti­on)

Evaluation of Equivalent Circuit Models for Plasma Bulk Characterization by Comparing IEDF Predictions with those of a Spatially Resolved CCP Model

2013 - Schabnam Naggary, Mohammed Shihab, Frank Atteln, Ralf Peter Brinkmann, Mustafa Megahed

66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Prin­ce­ton (New Jer­sey), USA, 30 Sep­tem­ber - 04 Oc­to­ber

Ion Energy Distribution Functions in Magnetized Capacitively Coupled RF Discharges

2013 - Jan Trieschmann, Mohammed Shihab, Daniel Szeremley, Abd Elfattah Elgendy, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

40th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS) & Pulsed Power and Plasma Science (PPPS) 2013, San Francisco (California), USA, 17-21 June

Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas

2013 - Julian Schulze, Torben Hemke, Denis Eremin, Thomas Mussenbrock, Aranka Derzsi, Zoltan Donkó, Kristian Dittmann, Jürgen Meichsner

DPG Früh­jahrs­ta­gung 2013, Jena, Ger­ma­ny, 25 Fe­bru­ary - 01 March

Kinetische Simulationen kapazitiv gekoppelter Mehrfrequenz- Sputterquellen

2013 - Denis Eremin, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2013, Jena, Ger­ma­ny, 25 Fe­bru­ary - 01 March

Modeling and simulation of electromagnetic effects in capacitive high frequency discharges

2013 - Denis Eremin, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

19th Symposium on Application of Plasma Processes, Vratna, Mala Fatra, Slovakia, 26.-31.1.2013

Simulations of electromagnetic effects in high-frequency capacitively coupled discharges using the Darwin approximation

2013 - Denis Eremin, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

J. of Physics D: Appl. Phys. 46, 084017 (2013) [DOI]

Numerical simulation of microplasma jets

2012 - Torben Hemke, Thomas Mussenbrock

Workshop on "Stability and Instabilities of Microplasmas", 31.05.-01.06.2012, Bochum

Particle-in-Cell Simulation magnetisierter Hochfrequenzplasmen

2012 - Jan Trieschmann, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2012, Stuttgart, Ger­ma­ny, March 12-16

Self consistent model for capacitive coupled plasmas

2011 - Mohammed Shihab, Dennis Ziegler, Ralf Peter Brinkmann

PT 15, Stuttgart, Ger­ma­ny, 28.02-02.03 2011,

The effects of nonlinear series resonance on Ohmic and stochastic heating in capacitive discharges

2008 - Michael. A. Lieberman, Allan. J. Lichtenberg, E. Kawamura, Thomas Mussenbrock, Ralf Peter Brinkmann

Phys. Plasmas 15, 063505 (2008);(9 pages) [DOI]

A Reduced-Fluid Dynamic Discharge Model for Applications in Technology-Oriented Computer-Aided Design

1995 - Ralf Peter Brinkmann, R. Fürst, C. Werner, Mathias Hierlemann

J. Electrochem. Soc., Volume 143, Issue 6 [DOI]
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