Publications

High Frequency behaviour of dual frequency capacitively coupled plasmas

2007 - Egmont Semmler, Peter Awakowicz, Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

28th Int. Con­fe­rence on Phe­no­me­na in Io­ni­zed Gases ICPIG, Pra­gue, Czech Re­pu­blic, 15-20 Juli

High frequency behaviour of dual frequency capacitive discharges: A global model

2007 - Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

Work­shop on Ra­dio-Fre­quen­cy Di­sch­ar­ges, Du­blin, Ire­land, 11-13 June
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