Publications

Effect of the relative phase of the driving sources on heating in dual frequency capacitive discharges

2009 - Dennis Ziegler, Jan Trieschmann, Thomas Mussenbrock, Ralf Peter Brinkmann

62th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Sa­ra­to­ga Springs (New York), USA, 20-23 Oc­to­ber
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