Modeling and Simulation of high-frequency driven Plasmas at medium and high Pressure

2009 - Torben Hemke, Ralf Peter Brinkmann

2nd Workshop FOR1123, Bochum, Germany, 14-15 December, oral contribution

Modeling of the electrode impedance e ffect induced by harmonics in asymmetric capacitively coupled rf plasmas

2009 - Max Engelhardt, Ralf Peter Brinkmann

WELTPP-12, Kerkrade, The Netherlands (2009)