Publications

Magnetron sputtering and spatio-temporal dynamics of neutral particle transport in a simplified processing reactor

2013 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Thomas Mussenbrock

WELT­PP-16, Kerk­ra­de, The Nether­lands, 21-22 No­vem­ber

Kinetic simulation of neutral particle transport in sputtering processes

2013 - Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Thomas Mussenbrock, Stefan Ries, Nikita Bibinov, Peter Awakowicz

66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Princeton (New Jersey), USA, 30 September - 04 Oc­to­ber

Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor

2013 - Kirsten Bobzin, Ralf Peter Brinkmann, Thomas Mussenbrock, Nazlim Bagcivan, Ricardo Henrique Brugnara, Marcel Schäfer, Jan Trieschmann

Surface and Coatings Technology 237 (2013) 176-181 [DOI]
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