Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges

2017 - Jan Trieschmann, Frederik Schmidt, Thomas Mussenbrock

Plasma Processes and Polymers 14, 1600140 (2017) [DOI]

On the physics of a large CCP discharge

2016 - Denis Eremin, Stefan Bienholz, Daniel Szeremley, Jan Trieschmann, Stefan Ries, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

2016 Plasma Sources Sci. Technol. 25 025020

Transport of Sputtered Particles in Capacitive Sputter Sources

2015 - Jan Trieschmann, Thomas Mussenbrock

Journal of Applied Physics 118, 033302 (2015) [J. Applied Physics] [] [DOI]

The effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges

2015 - Sebastian Wilczek, Jan Trieschmann, Ralf Peter Brinkmann, Thomas Mussenbrock, Julian Schulze, Edmund Schüngel, Aranka Derzsi, Ihor Korolov, Zoltán Donkó

2015 Plasma Sources Sci. Technol. 24 024002

Simulations of electromagnetic effects in high-frequency capacitively coupled discharges using the Darwin approximation

2013 - Denis Eremin, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

J. of Physics D: Appl. Phys. 46, 084017 (2013) [DOI]

The effects of nonlinear series resonance on Ohmic and stochastic heating in capacitive discharges

2008 - Michael. A. Lieberman, Allan. J. Lichtenberg, E. Kawamura, Thomas Mussenbrock, Ralf Peter Brinkmann

Phys. Plasmas 15, 063505 (2008);(9 pages) [DOI]

A Reduced-Fluid Dynamic Discharge Model for Applications in Technology-Oriented Computer-Aided Design

1995 - Ralf Peter Brinkmann, R. Fürst, C. Werner, Mathias Hierlemann

J. Electrochem. Soc., Volume 143, Issue 6 [DOI]