Publications

Kinetic simulation of low pressure capacitively coupled plasmas: Analysis of an abrupt mode transition

2013 - Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Thomas Mussenbrock

WELT­PP-16, Kerk­ra­de, The Nether­lands, 21-22 No­vem­ber (oral cont­ri­bu­ti­on)

Evaluation of Equivalent Circuit Models for Plasma Bulk Characterization by Comparing IEDF Predictions with those of a Spatially Resolved CCP Model

2013 - Schabnam Naggary, Mohammed Shihab, Frank Atteln, Ralf Peter Brinkmann, Mustafa Megahed

66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Prin­ce­ton (New Jer­sey), USA, 30 Sep­tem­ber - 04 Oc­to­ber

Ion Energy Distribution Functions in Magnetized Capacitively Coupled RF Discharges

2013 - Jan Trieschmann, Mohammed Shihab, Daniel Szeremley, Abd Elfattah Elgendy, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

40th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS) & Pulsed Power and Plasma Science (PPPS) 2013, San Francisco (California), USA, 17-21 June

Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas

2013 - Julian Schulze, Torben Hemke, Denis Eremin, Thomas Mussenbrock, Aranka Derzsi, Zoltan Donkó, Kristian Dittmann, Jürgen Meichsner

DPG Früh­jahrs­ta­gung 2013, Jena, Ger­ma­ny, 25 Fe­bru­ary - 01 March

Kinetische Simulationen kapazitiv gekoppelter Mehrfrequenz- Sputterquellen

2013 - Denis Eremin, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2013, Jena, Ger­ma­ny, 25 Fe­bru­ary - 01 March

Modeling and simulation of electromagnetic effects in capacitive high frequency discharges

2013 - Denis Eremin, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

19th Symposium on Application of Plasma Processes, Vratna, Mala Fatra, Slovakia, 26.-31.1.2013

Simulations of electromagnetic effects in high-frequency capacitively coupled discharges using the Darwin approximation

2013 - Denis Eremin, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

J. of Physics D: Appl. Phys. 46, 084017 (2013) [DOI]
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