The Electrical Asymmetry Effekt - A novel and simple method for separate control of ion energy and flux in capacitively couled RF discharges

2009 - Uwe Czarnetzki, Brian Heil, Julian Schulze, Zoltan Donko, Thomas Mussenbrock, Ralf Peter Brinkmann

Journal of Physics: Conference Series,Volume 162, Number 1 [DOI]

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

2008 - B. G. Heil, U. Czarnetzki, Ralf Peter Brinkmann, Thomas Mussenbrock

J. Phys. D: Appl. Phys. 41, 165202 (2008) [DOI]