Publications

The Multipole Resonance Probe: Investigation of an Active Plasma Resonance Probe Using 3D-electromagnetic Field Simulations

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

42nd European Microwave Week, pp. 566-569 Amsterdam, The Netherlands, Oct 28 – Nov 2, 2012 [IEEE-Library]

A Novel Radio-Frequency Plasma Probe for Monitoring Systems in Dielectric Deposition Processes

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

International Conference on Electromagnetics in Advanced Applications (ICEAA '12), pp. 728-731, DOI: 10.1109/ICEAA.2012.6328725, Cape Town, South Africa, Sep 2-7, 2012 [IEEE-Library]

Film deposition on the inner surface of tubes using atmospheric-pressure Ar-CH4, Ar-C2H2 and Ar-C2H2-H-2 plasmas: interpretation of film properties from plasma-chemical kinetics

2012 - Ramasamy Pothiraja, Max Engelhardt, Nikita Bibinov, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 45, Issue: 33, Article Number: 335202, DOI: 10.1088/0022-3727/45/33/335202, Published: AUG 22 2012

Quantitative characterization of a dielectric barrier discharge in air applying non-calibrated spectrometer, current measurement and numerical simulation

2012 - Priyadarshini Rajasekaran, Nikita Bibinov, Peter Awakowicz

MEASUREMENT SCIENCE & TECHNOLOGY, Volume: 23, Issue: 8, Article Number: 085605, DOI: 10.1088/0957-0233/23/8/085605, Published: AUG 2012

On plasma ion beam formation in the Advanced Plasma Source

2012 - Jens Harhausen, Ralf Peter Brinkmann, Rüdiger Foest, Mario Hannemann, Andreas Ohl, Benjamin Schröder

Plasma Sources Sci. Technol. 21 (2012) 035012 [DOI]

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

2012 - Ralf Peter Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz

PCT/DE2011/001802, R. P. Brinkmann, J. Oberrath, P. Awakowicz, M. Lapke, T. Musch, T. Mussenbrock, I. Rolfes, C. Schulz, R. Storch, T. Styrnoll, C. Zietz (Erfinder), Ruhr-Universität Bochum (Anmelder), Offenlegung 12.04.2012

Charakterisierung von Plasmaprozessen zur ionengestützten Abscheidung (PIAD) von optischen Schichten

2012 - Jens Harhausen, Ralf Peter Brinkmann, Rüdiger Foest, Andreas Ohl, Benjamin Schröder, Hartmut Steffen

DPG Frühjahrstagung, 12.-16.3. 2012, Stuttgart (talk) [Abstract]

Ein nicht-lokales driftkinetisches Elektronenmodell für eine magnetisch unterstützte DC-Entladung

2012 - Benjamin Schröder, Ralf Peter Brinkmann

DPG Frühjahrstagung der Sektion AMOP, 12.-16. März 2012, Stuttgart (poster presentation) [Abstract]

Particle-in-Cell Simulation magnetisierter Hochfrequenzplasmen

2012 - Jan Trieschmann, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2012, Stuttgart, Ger­ma­ny, March 12-16

Dual frequency capacitive plasmas in Fe and Ni sputter applications: correlation of discharge properties on thin film properties

2012 - Stefan Bienholz, Egmont Semmler, Peter Awakowicz, H Brunken, A Ludwig

PLASMA SOURCES SCIENCE & TECHNOLOGY, Volume: 21, Issue: 1, Article Number: 015010, DOI: 10.1088/0963-0252/21/1/015010, Published: FEB 2012
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