Publications

Sputtering process data interpreted by heavy particle simulations

2017 - Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider, Thomas Mussenbrock

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

Transport of Sputtered Particles in Capacitive Sputter Sources

2015 - Jan Trieschmann, Thomas Mussenbrock

Journal of Applied Physics 118, 033302 (2015) [J. Applied Physics] [arxiv.org] [DOI]

Kinetische Simulation der Dynamik gesputterten Aluminiums in kapazitiv gekoppelten Mehrfrequenzplasmen

2015 - Jan Trieschmann, Stefan Ries, Stefan Bienholz, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2015, Bochum, Ger­ma­ny, 2-5 March

Kinetic Approach to Neutral Particle Transport in High Power Impulse Magnetron Sputtering

2014 - Jan Trieschmann, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

The 14th International Conference on Plasma Surface Engineering (PSE) 2014, Garmisch-Partenkirchen, Germany, September 15 - 19, 2014

Simulation of Neutral Gas Dynamics for PVD DC-MSIP and HPPMS Processes

2013 - Kirsten Bobzin, Nazlim Bagcivan, Sebastian Theiß, Ricardo Henrique Brugnara, Marcel Schäfer, Ralf Peter Brinkmann, Thomas Mussenbrock, Jan Trieschmann

40th International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2013), San Diego (California), USA, 29 April - 03 May

Control of ion distribution functions in capacitive sputter sources

2012 - Denis Eremin, Sara Gallian, Daniel Szeremley, Ralf Peter Brinkmann, Thomas Mussenbrock

International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, USA (2012)
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