Kinetic Simulations of a Large-Sized Multifrequency CCP-Based Sputtering Source with a PIC/MCC Darwin Code

2013 - Denis Eremin, Stefan Bienholz, Daniel Szeremley, Torben Hemke, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

40th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS) & Pul­sed Power and Plas­ma Sci­ence (PPPS) 2013, San Fran­cis­co (Ca­li­for­nia), USA, 17-21 June

Kinetische Simulationen kapazitiv gekoppelter Mehrfrequenz- Sputterquellen

2013 - Denis Eremin, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2013, Jena, Ger­ma­ny, 25 Fe­bru­ary - 01 March