Publications

Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor

2013 - Kirsten Bobzin, Ralf Peter Brinkmann, Thomas Mussenbrock, Nazlim Bagcivan, Ricardo Henrique Brugnara, Marcel Schäfer, Jan Trieschmann

Surface and Coatings Technology 237 (2013) 176-181 [DOI]

Simulation of Neutral Gas Dynamics for PVD DC-MSIP and HPPMS Processes

2013 - Kirsten Bobzin, Nazlim Bagcivan, Sebastian Theiß, Ricardo Henrique Brugnara, Marcel Schäfer, Ralf Peter Brinkmann, Thomas Mussenbrock, Jan Trieschmann

40th International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2013), San Diego (California), USA, 29 April - 03 May
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