Evaluation of Equivalent Circuit Models for Plasma Bulk Characterization by Comparing IEDF Predictions with those of a Spatially Resolved CCP Model

2013 - Schabnam Naggary, Mohammed Shihab, Frank Atteln, Ralf Peter Brinkmann, Mustafa Megahed

66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Prin­ce­ton (New Jer­sey), USA, 30 Sep­tem­ber - 04 Oc­to­ber

Ion Energy Distribution Functions in Magnetized Capacitively Coupled RF Discharges

2013 - Jan Trieschmann, Mohammed Shihab, Daniel Szeremley, Abd Elfattah Elgendy, Sara Gallian, Denis Eremin, Ralf Peter Brinkmann

40th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS) & Pulsed Power and Plasma Science (PPPS) 2013, San Francisco (California), USA, 17-21 June