Publications

Theoretische Basis von Plasma- und Schichtmodellierung in optischen Beschichtungsprozessen

2013 - Benjamin Schröder, Ralf Peter Brinkmann, Marcus Turowski, Thomas Frauenheim, Thomas Köhler, Marc Landmann, Jens Harhausen, Rüdiger Foest, Andreas Ohl, Norbert Kaiser, Olaf Stenzel, Steffen Wilbrandt

DPG-Frühjahrstagung, 25.02.-01.03.2013, Jena (talk) [DPG-Verhandlungen]

Gyrokinetic Simulation for the Advanced Plasma Source

2012 - Benjamin Schröder, Ralf Peter Brinkmann

65th Annual Gaseous Electronics Conference October 22–26, 2012; Austin, Texas (poster presentation) [abstract]
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