Publications

Harmonics excitation in capacitive rf discharges: A spatially resolved nonlinear model

2007 - Dennis Ziegler, Martin Lapke, Thomas Mussenbrock, Ralf Peter Brinkmann

60th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Arlington (Virginia), USA, 02-05 Oc­to­ber
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