Publications

Nonlinear electron resonance heating in dual frequency capacitive discharges

2006 - Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

59th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Co­lum­bus (Ohio), USA, 10-13 Oc­to­ber, oral contribution
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