Publications

The electrical asymmetry e ffect: A novel method to generate a variable DC self bias in capacitive RF discharges

2008 - Edmund Schüngel, Julian Schulze, Zoltan Donko, Brian Heil, Thomas Mussenbrock, Ralf Peter Brinkmann, Uwe Czarnetzki

WELTPP-11 , Kerkrade, The Netherlands ,13-14 November
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