Publications

The Electrical Asymmetry Effekt - A novel and simple method for separate control of ion energy and flux in capacitively couled RF discharges

2009 - Uwe Czarnetzki, Brian Heil, Julian Schulze, Zoltan Donko, Thomas Mussenbrock, Ralf Peter Brinkmann

Journal of Physics: Conference Series,Volume 162, Number 1 [DOI]
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