Publications

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

2008 - B. G. Heil, U. Czarnetzki, Ralf Peter Brinkmann, Thomas Mussenbrock

J. Phys. D: Appl. Phys. 41, 165202 (2008) [DOI]

Beyond the step model: Approximate expressions for the field in the plasma boundary sheath

2007 - Ralf Peter Brinkmann

© 2007 American Institute of Physics J. App. Phys. 102, 093303 (2007) [DOI]
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