Publications

Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor

2013 - Kirsten Bobzin, Ralf Peter Brinkmann, Thomas Mussenbrock, Nazlim Bagcivan, Ricardo Henrique Brugnara, Marcel Schäfer, Jan Trieschmann

Surface and Coatings Technology 237 (2013) 176-181 [DOI]
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