Publications

A global model study of silane/hydrogen discharges

2013 - Stephan Danko, Dirk Bluhm, Valentin Bolsinger, Wladislaw Dobrygin, Oliver Schmidt, Ralf Peter Brinkmann

Plas­ma Sour­ces Sci. Tech­nol. 22, 055009 (2013) [DOI]
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