Transport of Sputtered Particles in Capacitive Sputter Sources

2015 - Jan Trieschmann, Thomas Mussenbrock

Journal of Applied Physics 118, 033302 (2015) [J. Applied Physics] [] [DOI]

The effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges

2015 - Sebastian Wilczek, Jan Trieschmann, Ralf Peter Brinkmann, Thomas Mussenbrock, Julian Schulze, Edmund Schüngel, Aranka Derzsi, Ihor Korolov, Zoltán Donkó

2015 Plasma Sources Sci. Technol. 24 024002