Chemical modelling of hydrogen diluted silane discharges: Uncertainty propagation of chemical input data using a global model

Dirk Bluhm, Sebastian Wilczek, Stephan Danko, Oliver Schmidt, Ralf Peter Brinkmann

31 ICPIG 2013 International Conference of phenomena in ionized gases, Granada, Spain, 14-19 July

Tags: Chemical, diluted, discharge;global, hydrogen, model, modeling;, silane