Analytical Study of Curling Probe: Resonance Frequencies

Ali Arshadi, Ralf Peter Brinkmann

66th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, September 30-October 4, 2013, Princeton, NJ.


Abstract

Electron density is a crucial characteristic in reactive plasma sources determining the quality of material processing like etching and deposition. It is vital to monitor electron density giving us the capability of controlling different chemical and physical reactions in plasma reactor.

A microwave plasma diagnostic probe called curling probe, invented recently by Liang et al. resonates in distinctive frequencies when it is embedded in the wall of the plasma reactor. The excited frequencies of probe are studied for various electron densities. It has been demonstrated that the high-frequency volume wave resonances and the low-frequency surface wave resonances are predictable considering the wave diffraction problem from curling probe. We have published the results of low-frequency resonances recently and in this paper we are generalizing our study in order to make it able to predict high-frequency resonances too. Resonance frequencies of probe are derived and show a good agreement with the reported study of probe inventors.

Tags: Curling Probe, Diagnostic Methods, Resonance frequency