The electrical asymmetry effect in capacitively coupled rf discharges

Julian Schulze, Edmund Schüngel, Zoltan Donko, Shinji Iwashita, Aranka Derzsi, Thomas Mussenbrock, Ralf Peter Brinkmann, Uwe Czarnetzki

3. International Workshop on Radio Frequency Discharges, Dublin, Rep. of Ireland (2011)

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