Symmetry breaking in high power pulsed magnetron sputtering (hppms) discharges - a phenomenological model

Sara Gallian, Denis Eremin, Daniel Szeremley, Thomas Mussenbrock, Ralf Peter Brinkmann, Ante Hecimovic, Teresa de los Arcos, Volker Schultz-von der Gathen, Mark Böke, Jörg Winter, William N. G. Hitchon

DPG Früh­jahrs­ta­gung 2012, Stutt­gart, Ger­ma­ny, March 12-16


Abstract

High power pulsed magnetron sputtering (HPPMS) is a recently developed IPVD (ionized physical vapor deposition) technique. In contrast to DC magnetrons, HPPMS discharges are operated with pulsed power sources, characterized by peak power densities of several kW, pulse durations of a few hundred microseconds, and repetition rates of a ten Hertz. Recently, it was found experimentally that HPPMS discharges exhibit pronounced spatio-temporal behavior, notably an instability which breaks the axial system of the setup. In this contribution we present a phenomenological model of that phenomenon, cast as a system of nonlinearly coupled partial differential equations for the plasma density ne and the neutral gas density nN. Analytical solutions for the model are presented and a comparison with experimental data is given. The authors acknowledge funding by the Deutsche Forschungsgemeinschaft within the frame of SFB-TR 87.

Tags: Hppms-instability