The Plasma-Sheath-Transition in RF-Modulated Low Temperature Plasmas: On the Existence of a Modified Bohm Criterion

Ralf Peter Brinkmann

38th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2011, Chi­ca­go, Il­li­nois, USA, June 25-30, given by A. Wollny

Tags: Bohm criterion, plasma sheath