An improved global model of capacitively coupled plasma discharges by employing a more exact fluid sheath model

Schabnam Naggary, Abd Elfattah Elgendy, Thomas Mussenbrock, Ralf Peter Brinkmann

WELT­PP-15 , Kerk­ra­de, The Nether­lands, 22.-23. November 2012, Poster


Abstract

The dynamics of capacitively coupled RF-discharges are strongly affected by charge-voltage characteristics of the plasma sheath. Under the application of the global model, this effect can be investigated by employment of the matrix sheath approach and a more exact sheath model realized by cubic charge-voltage characteristic.This work intends to investigate the influence of the charge-voltage characteristics on the RF-discharges and consequently on the power dissipation in the bulk.

Tags: An improved global model, more exact fluid sheath model