An improved global model of capacitively coupled plasma discharges by employing a more exact fluid sheath model
Schabnam Naggary, Abd Elfattah Elgendy, Thomas Mussenbrock, Ralf Peter Brinkmann
WELTPP-15 , Kerkrade, The Netherlands, 22.-23. November 2012, Poster
The dynamics of capacitively coupled RF-discharges are strongly affected by charge-voltage characteristics of the plasma sheath. Under the application of the global model, this effect can be investigated by employment of the matrix sheath approach and a more exact sheath model realized by cubic charge-voltage characteristic.This work intends to investigate the influence of the charge-voltage characteristics on the RF-discharges and consequently on the power dissipation in the bulk.