Modeling and simulation of electromagnetic effects in capacitive high frequency discharges

Denis Eremin, Torben Hemke, Ralf Peter Brinkmann, Thomas Mussenbrock

19th Symposium on Application of Plasma Processes, Vratna, Mala Fatra, Slovakia, 26.-31.1.2013


Abstract

The Darwin approximation of Maxwell's equations is investigated for its possible use in simulation of electromagnetic effects in large size, high frequency capacitively coupled discharges. The approximation is utilized within different frameworks plasma models which are applied to typical cases showing pronounced standing wave and skin effects. The Darwin approximation offers a simple and efficient way of carrying out electromagnetic simulations as it removes the Courant condition plaguing explicit electromagnetic algorithms and can be implemented as a straightforward modification of electrostatic algorithms.

Tags: ccp, electromagnetic effects, hf