Anomalous heating in capacitively coupled plasmas

Thomas Mussenbrock, J. Opretzka, Ralf Peter Brinkmann

57th Ga­se­ous Elec­tro­nics Con­fe­rence, 26-29 Sep­tem­ber, 2004, Shan­non, Re­pu­blic of Ire­land,

Tags: anomalous, heating