Characterization of capacitively coupled radio frequency discharges

Schabnam Naggary, Mohammed Shihab, Frank Atteln, Ralf Peter Brinkmann

WELT­PP-16, Kerk­ra­de, The Nether­lands, 21.-22. No­vem­ber 2013, Pos­ter

Tags: ccp-IEDF, characterization, of