A closed-loop Control Scheme for Capacitively Coupled Plasmas

Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann

27th Int. Con­fe­rence on Phe­no­me­na in Io­ni­zed Gases ICPIG, Eindhoven, The Netherlands, 17-22 Juli

Tags: Closed-loop, control scheme