The effect of realistic surface coefficients on the electron dynamics and process control in simulations of capacitive RF plasmas

Daksha, Manaswi, Birk Berger, Julian Schulze, Derzsi, Aranka, Korolov, Ihor, Donkó, Zoltán, Sebastian Wilczek, Thomas Mussenbrock

69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.

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