Effect of the relative phase of the driving sources on heating in dual frequency capacitive discharges

Dennis Ziegler, Jan Trieschmann, Thomas Mussenbrock, Ralf Peter Brinkmann

62th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Sa­ra­to­ga Springs (New York), USA, 20-23 Oc­to­ber

Tags: dual frequency, heating, relative phase