Electric Field Reversals in the sheath region of capacitively coupled RF discharges at di erent pressures

Julian Schulze, Zoltan Donko, Brian Heil, Dirk Luggenhölscher, Thomas Mussenbrock, Ralf Peter Brinkmann

62th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Sa­ra­to­ga Springs (New York), USA, 20-23 Oc­to­ber

Tags: different pressures, electric field reversals, sheath region