The electrical asymmetrie e ffect in capacitively coupled rf discharges- Analytical model and fluid simulation

Uwe Czarnetzki, Brian Heil, Thomas Mussenbrock, Ralf Peter Brinkmann, Julian Schulze, Edmund Schüngel

DPG Früh­jahrs­ta­gung 2009, Greifs­wald, Ger­ma­ny, 30-02 March, oral cont­ri­bu­ti­on

Tags: Analytical model, electrical asymmetrie e ffect, fluid simulation