The electrical asymmetry e ffect: A novel method to generate a variable DC self bias in capacitive RF discharges

Edmund Schüngel, Julian Schulze, Zoltan Donko, Brian Heil, Thomas Mussenbrock, Ralf Peter Brinkmann, Uwe Czarnetzki

WELTPP-11 , Kerkrade, The Netherlands ,13-14 November

Tags: DC self bias, novel