Electromagnetic effects in capacitively coupled plasma simulated with a PIC-MCC Darwin code

Denis Eremin, Thomas Mussenbrock, Ralf Peter Brinkmann, Markus Gebhardt

37th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2010, Nor­folk, Vir­gi­nia, USA, June 20-24

[DOI] [DOI]

Tags: electromagnetic effects, PIC-MCC Darwin code