Electron heating in asymmetric capacitively coupled radio frequency discharges at low pressures

Julian Schulze, Brian Heil, Dirk Luggenhölscher, Thomas Mussenbrock, Ralf Peter Brinkmann, Uwe Czarnetzki

19th European Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG), Granada, Spain, (2008)

Tags: electron heating, low pressure