Emulation of Spatially Distributed Plasma Density Profiles in 3D Electromagnetic Field Simulations

Birk Hattenhorst, Dennis Pohle, Christian Schulz, Ilona Rolfes, Thomas Musch

IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP 2019), pp. 166-168, DOI: 10.1109/IMWS-AMP.2019.8880104, Bochum, Germany, July 16-18, 2019


In this contribution, we introduce three dimensional electromagnetic field simulations for spatially distributed plasma density profiles. Basis for these simulations is a macro-based generation of a locally discretized and dispersive plasma environment that ensures a fast and parameterizable creation while keeping computational time reasonable in simulation tools like CST Microwave Studio. Moreover, measurements with a multipole resonance probe inside of a double inductively coupled plasma reactor confirm the introduced emulation approach.

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