Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressure

Brian Heil, Julian Schulze, Dirk Luggenhölscher, Thomas Mussenbrock, Ralf Peter Brinkmann

Journal of Physics D: Applied Physics, Volume 41, Number 4


Abstract

The generation of directed energetic electrons by the expanding sheath is observed in asymmetric capacitively coupled radio frequency discharges at low pressures (? 1 Pa) in different gases. The phenomenon of such electron beams is investigated by a combination of experimental diagnostics, an analytical model and simulations. At sufficiently low pressures multiple reflections of electron beams at the plasma boundaries are observed. An analytical model shows how these beams lead to an enhanced high energy tail of the electron energy distribution function. Thus, stochastic heating is closely related to electron beams.

[DOI]

Tags: asymmetric, capacitively coupled plasmas, electron beams, low pressure