A first look into Plasma-Plasma Interaction at atmospheric pressure via numerical simulation
Ralf Peter Brinkmann
37th IEEE International Conference on Plasma Science 2010, Norfolk, Virginia, USA, June 20-24
The micro plasma array developed by J.G. Eden and co-workers consists of a matrix of hollow cathode discharges of the size of a few ten micro meters. A silicon substrate with inverse pyramidal cavities is used as one electrode. The second electrode, seperated by a dielectrica, covers the space between cavities. The whole structure is covered with a second dielectric layer. The discharges are driven by a sinusoidal voltage at a frequency of 10-100kHz in atmospheric pressure Argon. Experiments performed by Schulz-von der Gathen and co-workers show strong interactions between the the micro discharges . The fundamental phenomenon is still unclear. This contribution is intended to show a first look into the modeling and simulation of micro plasma array and the plasma-plasma interaction.