A first look into Plasma-Plasma Interaction at atmospheric pressure via numerical simulation

Alexander Wollny, Torben Hemke, Markus Gebhardt, Thomas Mussenbrock, Ralf Peter Brinkmann

37th IEEE International Conference on Plasma Science 2010, Norfolk, Virginia, USA, June 20-24


The micro plasma array developed by J.G. Eden and co-workers consists of a matrix of hollow cathode discharges of the size of a few ten micro meters. A silicon substrate with inverse pyramidal cavities is used as one electrode. The second electrode, seperated by a dielectrica, covers the space between cavities. The whole structure is covered with a second dielectric layer. The discharges are driven by a sinusoidal voltage at a frequency of 10-100kHz in atmospheric pressure Argon. Experiments performed by Schulz-von der Gathen and co-workers show strong interactions between the the micro discharges [2]. The fundamental phenomenon is still unclear. This contribution is intended to show a first look into the modeling and simulation of micro plasma array and the plasma-plasma interaction.

S.-J. Park, J. Chen, C. J. Wagner, N. P. Ostrom, C. Liu and J. G. Eden, IEEE J. Sel. Top. Quantum Electron 8, 387 (2002)
V. Schulz-von der Gathen et al., private communication


Tags: atmospheric pressure, Micro Cavity Plasma Array, nonpdpsim, Plasma-Plasma Interaction