A general description of active resonance spectroscopic diagnostic tools for technical plasmas

Martin Lapke, Jens Oberrath, Thomas Mussenbrock, Ralf Peter Brinkmann

37th IEEE International Conference on Plasma Science 2010, Norfolk, Virginia, USA, June 20-24, oral contribution


Abstract

This contribution investigates resonance spectroscopic plasma diagnostic. The idea is simple - the frequency dependence of the power absorption is displayed via a rf-signal fed to an antenna. Using the absorption spectrum, plasma parameter like the electron density or electron temperature are calculated. Starting five decades ago numerous concepts based on this idea have been developed as a promising concept for plasma diagnostics in an industrial setting - which means that the proposed methods are robust, calibration free, and economical, and can be used for ideal and reactive plasmas alike.

Tags: active resonance, general description, spectroscopic tools, technical plasmas