A Global Model of a Micro Atmospheric Pressure Plasma Jet

Alexander Wollny, Torben Hemke, Dennis Ziegler, Ralf Peter Brinkmann, Thomas Mussenbrock

63rd Annual Gaseous Electronics Conference 2010, Paris, France, October 04-08


Abstract

Micro atmospheric pressure gas discharges offer new applications in biomedical treatment and material processing [1]. A global model is presented, which describes the bulk chemistry with wall looses and an electron temperature as a function of time. The chemical model is self-consistently coupled to an electrical model. The latter considers a capacitively coupled rf-discharge by means of a non-linear lumped circuit model which accounts for nonlinear electron resonance heating [2]. In this contribution a geometry, based on the micro atmospheric pressure plasma jet is considered. This device is investigated by V. Schulz-von der Gathen and co-workers at Ruhr-University Bochum. Various parameter studies are performed and results are shown for Helium as a working gas.

[1]
F. Iza, et al., Plasma Process. Polym., 5, 322 (2008)
[2]
D. Ziegler, et al., Physics of Plasmas, 16, 023503 (2009)

Tags: atmospheric pressure, global model, lumped circuit, Microplasma