A Global Model of a Micro Atmospheric Pressure Plasma Jet
Alexander Wollny, Torben Hemke, Dennis Ziegler, Ralf Peter Brinkmann, Thomas Mussenbrock
63rd Annual Gaseous Electronics Conference 2010, Paris, France, October 04-08
Micro atmospheric pressure gas discharges offer new applications in biomedical treatment and material processing . A global model is presented, which describes the bulk chemistry with wall looses and an electron temperature as a function of time. The chemical model is self-consistently coupled to an electrical model. The latter considers a capacitively coupled rf-discharge by means of a non-linear lumped circuit model which accounts for nonlinear electron resonance heating . In this contribution a geometry, based on the micro atmospheric pressure plasma jet is considered. This device is investigated by V. Schulz-von der Gathen and co-workers at Ruhr-University Bochum. Various parameter studies are performed and results are shown for Helium as a working gas.
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