Global model of oxygen plasmas: A benchmark study and the role of the vibrational quanta of O2

Efe Kemaneci, J van Dijk, Thomas Mussenbrock, Ralf Peter Brinkmann

68th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence/9th In­ter­na­tio­nal Con­fe­rence on Re­ac­tive Plas­mas/33rd Sym­po­si­um on Plas­ma Pro­ces­sing, Ho­no­lu­lu, USA, Oc­to­ber 12-15 201


Oxygen plasmas are investigated based on a global modelling approach with a focus on the inductive radio-frequency discharges in both continuous and pulse-modulated modes. A throughout benchmark study is performed mainly with respect to the experimental data available in literature. The experimental data is preferred to cover a wide range of energy coupling modes: (asymmetric) capacitive, inductive as well as microwave modes; and an agreement is obtained in both continuous and pulse-modulated power inputs. In a benchmark case of a microwave-induced reactor plasma, a spatially-resolved plasma fluid model is also developed that is self-consistently coupled to the microwave propagation and the data is compared with the results of the corresponding global model simulation. The role of the vibrational quantum levels of molecular oxygen is analysed, where a set of chemical kinetics is proposed. The chemical kinetics includes 41 vibrational quanta as well as the e-V, V-V and V-T interactions. A ladder-like dissociation mechanism is also incorporated, where the highest vibrational quanta are set to be a pseudo-level and it is assumed to dissociate immediately.