Global modelling of cylindrical surface wave discharges

Efe Kemaneci, Ralf Peter Brinkmann

DPG Früh­jahrs­ta­gung 2016, Han­no­ver, Ger­ma­ny, 29 Fe­bru­ary - 04 March


The surface wave discharges have a unique axial structure of dielectricplasma interface that allows the plasma to enlarge axially due to the microwave propagation along the interface. This feature differentiates them from other types of plasmas that mostly associates with much smaller axial lengths and very different axial characteristics. This unique structure is to be considered in global (0-D volume-averaged) modelling approaches in order to self-consistently define the ion and electron losses at the wall as well as the energy dissipated in the sheath. In this study, we focus on this issue and implement a global model of pulse-modulated and continuous surface wave discharges