A hybrid, one-dimensional model of capacitively coupled radio-frequency discharges

Brian Heil, Julian Schulze, Dirk Luggenhölscher, Uwe Czarnetzki, Thomas Mussenbrock, Ralf Peter Brinkmann

J. Phys. D: Applied Physics, Volume 41, Number 22


Abstract

A one-dimensional, numerical model was developed to aid in the investigation of electron dynamics in the plasma boundary sheath of RF discharges. It incorporates several different modules. A fluid based plasma boundary sheath model and an accompanying equivalent circuit model are first used to calculate the time-dependent electric field due to displacement current and charged particle densities in the sheath. The electric fields calculated in this model are then combined with the Ohmic electric field or the field due to conduction current and joined to a simplified model of the plasma bulk. This combination is then used in a Monte Carlo simulation to calculate the electron energy distribution function. This model includes stochastic and Ohmic heating of electrons. The model reproduces experimentally measured electron energy probability functions over a broad range of pressures.

[DOI]

tags: Hybrid, one dimensional simulation, RF plasma boundary sheath